Newly developed GaN based MEMS resonator operates stably even at high temperature

JST PRESTO researcher developed a MEMS resonator that stably operates even under high temperatures by regulating the strain caused by the heat from gallium nitride (GaN). This device is small, highly sensitive and can be integrated with CMOS technology promising for the application to 5G communication, IoT timing device, on-vehicle applications, and advanced driver assistance system.

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